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Fabrication of 2D periodic structures on silicon after scanning with fs-laser multi-beams: (a) overview of the grid-like structures; (b,c) enlarged view of the laser-induced surface morphologies before and after HF-etching for 60 min and (d) spectral absorptance of the samples. Reprinted from Pan et al. [99], Copyright 2016, with permission from Elsevier.
