| PECVD | Plasma enhanced chemical vapor deposition |
| Tvis | Visible transmittance |
| Eos | Optical switching efficiency |
| VO2 | Vanadium dioxide |
| MIT | Metal-insulator transition |
| SEM | Scanning electron microscopy |
| XRD | X-ray diffraction |
| PECVD | Plasma enhanced chemical vapor deposition |
| Tvis | Visible transmittance |
| Eos | Optical switching efficiency |
| VO2 | Vanadium dioxide |
| MIT | Metal-insulator transition |
| SEM | Scanning electron microscopy |
| XRD | X-ray diffraction |