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AFM imaging of pores fabricated in thin silicon membrane. (a,b) Sample A with pore size 180 ± 12 nm fabricated under J = 0.47 mA/cm2 with 5% HF and (c,d) Sample B with pore size 520 ± 22 nm fabricated under J = 1.57 mA/cm2 with 10% HF. (a) 5 × 5 µm2; (b) 2 × 2 µm2; (c) 15 × 15 µm2; and (d) 5 × 5 µm2.
