Table 1.

Summarized description of important parameters contributed to the fabrication of a single pore in a Si membrane. Thickness of each pore is about 1.17 ± 0.05 µm.

Pore Dimension	Electrolyte 49%HF:95%Ethanol:H2O	Current Density (mA/cm2)	Etch Rate (nm/min)	Estimated Time (min)
180 ± 12 nm	5:50:45	0.47	52.167	22
520 ± 35 nm	10:45:45	1.57	69.593	16
1.53 ± 0.11 µm	15:45:40	4.91	80.714	14