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The steps of the applied grinding and polishing process.
| Abrasive | Time (min) | Load (N) | Revolution (min−1) | Direction |
|---|---|---|---|---|
| P 320 SiC | 1 | 22 | 220 | counter |
| P 600 SiC | 1 | 22 | 220 | counter |
| P 1200 SiC | 1 | 22 | 220 | counter |
| P 2400 SiC | 1 | 22 | 220 | counter |
| 6 μm diamond | 15 | 27 | 150 | counter |
| 3 μm diamond | 6 | 27 | 150 | counter |
| 0.05 μm SiO | 3 | 27 | 125 | comply |
