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. 2013 May 31;6(6):2262–2273. doi: 10.3390/ma6062262

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© 2013 by the authors;

licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).

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Pressure dependence variation in (a) electron density and electron temperature with reactor pressure. Functional fits as shown. (Typical plasma conditions: 45 W/550 V, 700 °C, 4:1 NH₃:C₂H₂). Functional fits as indicated; (b) Power dependence variation in electron density and electron temperature with power. (Typical plasma conditions: 700 °C, 3.2 mbar, 200:50 sccm). Functional fits as indicated.