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(a) Schematic diagram of the uncooled IR sensor (thermopile) with Au-based 2D-PA; (b) SEM image of the microelectromechanical systems (MEMS)-based thermopile with 2D-PA. Magnified SEM images of the 2D-PAs of (c) (ii) and (d) (vii); (e) Schematic diagram of the 2D-PA.
