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. 2017 Feb 13;10(2):173. doi: 10.3390/ma10020173

Figure 2.

Figure 2

(af) Representative SEM cross-sections of coatings deposited onto Si(001) by (a) process 1; (b) process 2; (c) process 3; (d) process 4; (e) process 5; and (f) process 6. The Si(001)/SiNx interfaces are indicated.