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. 2017 Jun 8;7:3077. doi: 10.1038/s41598-017-03228-4

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© The Author(s) 2017

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Sample alignment on LM and RM. (a) Illustration of the initial assembly errors. Φ and Ψ are the initial rotational errors on the two rotational joints of the robot. (b) Sample’s position before and after LM alignment by TIA approach. α is chosen as 90°. (c) Offset ΔP _err in one revolution (360°) before and after LM alignment. (d) SEM image and highlight area (unit: pixel) of the sample at initial condition and after deformation, corresponding to the black line in (e). (e) Changing of the highlighted area during the upward movement of RM. Six experiments are designed independently by taking six different samples. The side view image is taken at step 3.5 corresponding to the sample indicating by black line.