Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Summary of the critical fabrication parameters: The nominal thicknesses of the Ormocomp® base and channel layers with the corresponding spinning speeds and the UV exposure doses and proximity gap distances used in the study.
| Layer | Nominal thickness (μm) | Spinning speed (rpm) | UV exposure dose (mJ/cm2) | Proximity gap distance (μm) |
|---|---|---|---|---|
| Base | 15 | 6000 | 76 | 400 |
| Channel | 15 | 6000 | 13, 19, 29, or 48 | 400, 500, 600, 700, 900, or 1000 |
| 35 | 2000 | |||
| 45 | 1400 |
