Table 2.

Oxidation conditions for metallic layers.

Material	Time	Pressure	Temperature	Gas Flow
CuO	15 h	Atmospheric pressure	300–400 °C	300SCCM (80% O2 and 20% Ar)
ZnO	12 h	Atmospheric pressure	200–900 °C	300SCCM (20% O2 and 80% Ar)
WO3	1 h	0.8 mbar	550 °C	O2-2SCCM