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|
Layer (μm, OPL) |
SC | EP | LP | MM | SM |
|---|---|---|---|---|---|
|
Automatic Thickness |
33.3 ± 1.1 | 23.1 ± 1.1 | 15.4 ± 0.9 | 14.5 ± 0.9 | 24.3 ± 1.1 |
|
| |||||
|
Manual Thickness Reader 1 Reader 2 |
34.1 ± 1.0 33.0 ± 0.9 |
22.4 ± 1.0 23.5 ± 1.0 |
14.7 ± 0.7 15.0 ± 0.9 |
14.8 ± 1.1 14.1 ± 1.0 |
24.6 ± 1.2 24.0 ± 1.1 |
