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Design and characterization. a) Schematic representation of microfluidic channel integrated with grating coupled-HMM biosensor. b) SEM image of 2D gold hole array diffraction grating on top of the HMM (period = 500 nm and hole diameter = 160 nm). c) Reflectance spectrum of grating coupled-Au/Al2O3 HMM at 30° angle of incidence (wavelength spectroscopic resolution was set to 2 nm).
