Table 1. Average global surface roughness of Cu film across 120×160 μm2 surfaces, coverage of transferred graphene measured by SEM image and image processing software, and monolayer-bilayer coverage processed by analyzing three sets of Raman map data from each Cu-Ni thicknesses.
Cu thickness in Cu-Ni (nm) | Global1 roughness (nm) | Coverage2 (transferred, %) | Monolayer3 coverage (% of Coverage) | >Bilayer3 coverage (% of Coverage) |
---|---|---|---|---|
100 | 96 | 46 | 95 | 5 |
150 | 50 | 78 | 99 | 1 |
200 | 55 | 88 | 96 | 4 |
250 | 53 | 97 | 97 | 3 |
500 | 69 | 94 | 80 | 20 |
750 | 54 | 98 | 74 | 26 |
1000 | 58 | 97 | 56 | 44 |
Optical profilometer
Measurement by SEM
Measurement by Raman