Table 1. Chemical composition, elastic modulus, tensile strength, hardness, and activation volume of the sputter-deposited Ni-Mo-W film obtained from WDS, microtensile, and nanoindentation tests.

Composition (at %)	Elastic modulus (GPa)	Tensile strength (GPa)	Hardness (GPa)			Activation volume (b3)
			0.05 s−1	0.2 s−1	1 s−1
Ni83.6±0.2Mo14±0.2W2.4±0.1	221 ± 5	2.8 ± 0.3	8.95 ± 0.82	9.1 ± 0.91	9.24 ± 0.86	19.6