Table 4.
Samples | Number of Layers | Depth/μm (Zn Layer) | Depth a/μm (Hybrid + Zn Layer) | Hybrid Thickness/μm (Hybrid + Zn Layer − Zn Layer) |
---|---|---|---|---|
Control | - | 19 | - | - |
U(600):3.45TEOS | 1 | - | 21 | 2 |
3 | 25 | 4 | ||
U(900):3.45TEOS | 1 | - | 23 | 4 |
3 | 27 | 8 | ||
U(2000):3.45TEOS | 1 | - | 28 | 9 |
3 | 30 | 11 |
a Hybrid thickness obtained according to ISO 16962:2005(E).