Table 5.

EIS data fitting of the U(X) hybrid film samples with different ratios of TEOS.

Hybrid Sample	RSample/Ω·cm2	CPE (Q)/Sα·Ω−1·cm−2	α	Χ2
U(600)
1:4.16:0 (a)	3.78 × 107 (±0.85%)	1.42 × 10−11 (±3.14%)	0.90 (±0.29%)	7.09 × 10−3
1:4.16:3.45 (a)	4.48 × 108 (±3.71%)	1.59 × 10−11 (±3.71%)	0.85 (±0.47%)	7.47 × 10−3
1:4.16:4.29	3.15 × 108 (±1.30%)	2.75 × 10−11 (±3.06%)	0.90 (±0.32%)	2.30 × 10−2
1:4.16:12.86 (a)	9.42 × 105 (±0.19%)	3.92 × 10−10 (±3.23%)	0.76 (±0.40%)	1.64 × 10−2
U(900)
1:4.16:0 (a)	1.71 × 107 (±0.72%)	4.36 × 10−11 (±3.14%)	0.90 (±0.31%)	1.05 × 10−2
1:4.16:3.45 (a)	4.82 × 107 (±1.14%)	1.61 × 10−11 (±3.91%)	0.89 (±0.41%)	9.95 × 10−3
U(2000)
1:4.16:0 (a)	1.52 × 106 (±0.59%)	5.98 × 10−11 (±4.30%)	0.91 (±0.42%)	7.23 × 10−3
1:4.16:3.45 (a)	6.50 × 106 (±0.44%)	2.32 × 10−11 (±2.68%)	0.93 (±0.24%)	3.92 × 10−3

Notes: ^(a) EIS data fitting at high frequencies using the EEC, as shown as inset in correspondent Nyquist plots, Figure 7 and Figure 8.