Table 6.
Electrical properties (average values) obtained for the U(X) hybrid film samples with different ratios of TEOS.
| Hybrid Sample | log (R/Ω·cm2) | −log (σ/Scm−1) | C/pF·cm−2 | εr |
|---|---|---|---|---|
| U(600) | ||||
| 1:4.16:0 | 7.47 ± 0.01 | 8.31 ± 0.01 | 8.12 ± 0.05 | 13.4 ± 0.1 |
| 1:4.16:3.45 | 8.57 ± 0.03 | 9.86 ± 0.03 | 8.69 ± 0.42 | 15.8 ± 0.8 |
| 1:4.16:4.29 | 8.41 ± 0.06 | 9.92 ± 0.06 | 20.5 ± 2.0 | 9.40 ± 1.10 |
| 1:4.16:12.86 | 8.56 ± 0.04 | 10.5 ± 0.1 | 30.8 ± 0.6 | 3.70 ± 0.10 |
| U(900) | ||||
| 1:4.16:0 | 7.16 ± 0.06 | 8.20 ± 0.03 | 25.1 ± 0.1 | 23.9 ± 0.1 |
| 1:4.16:3.45 | 7.57 ± 0.02 | 8.50 ± 0.02 | 8.80 ± 0.07 | 11.6 ± 0.4 |
| U(2000) | ||||
| 1:4.16:0 | 6.13 ± 0.09 | 7.20 ± 0.16 | 31.0 ± 3.5 | 29.7 ± 1.9 |
| 1:4.16:3.45 | 6.67 ± 0.11 | 7.65 ± 0.04 | 14.1 ± 0.2 | 15.3 ± 0.2 |