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. Author manuscript; available in PMC: 2018 Feb 1.
Published in final edited form as: Adv Healthc Mater. 2017 Jan 12;6(4):10.1002/adhm.201601356. doi: 10.1002/adhm.201601356

Figure 1. b-Si structured IOP sensor.

Figure 1

(a) Conceptual illustration of the implantable IOP sensor with a microscale optical cavity and a zoomed-in image. (b) A Si-only sensor consisting of an active core cavity and a reflective peripheral inactive region. Reflection arises from both the cavity (shown in blue) and the Si (shown in red). (c) A b-Si sensor with integrated b-Si on the inactive hollow disk. Only the reflection from the core cavity is captured. The inset is a SEM image of the b-Si grown on the inactive region.