Table 1.
Refined thicknesses and SLD values for the sample measured in this study. Si SLD values without errors were constrained using the fitted thickness while those with errors were left to vary in the fit. The values in the SEI columns for the air fit are actually the oxide layer on top of the a-Si.
| Li-Si ratio | Voltage | Substrate SiOx Thickness (Å) | SiO2 SLD (10−6 Å−2) | Cu Thickness (Å) | Cu SLD (10−6 Å−2) | Si Thickness (Å) | Si SLD (10−6 Å−2) | SEI Thickness (Å) | SEI SLD (10−6 Å−2) | SEI Roughness (Å) | Chi2 |
|---|---|---|---|---|---|---|---|---|---|---|---|
| 0.00 | air | 35 ± 1 | 3.3 ± 0.2 | 62 ± 1 | 6.7 ± 0.1 | 995 ± 6 | 2.0 ± 0.1 | 50 ± 5 | 1.3 ± 0.1 | 5.0 ± 0.3 | 1.7 |
| 0.00 | OCV | 35 ± 1 | 3.3 ± 0.2 | 62 ± 1 | 6.7 ± 0.1 | 1002 ± 11 | 2.0 ± 0.1 | 60 ± 9 | 2.6 ± 0.3 | 14 ± 2 | 2.0 |
| 0.00 | 0.90 | 35 ± 1 | 3.3 ± 0.2 | 62 ± 1 | 6.7 ± 0.1 | 1002 ± 11 | 2.0 ± 0.1 | 58 ± 9 | 2.6 ± 0.3 | 13 ± 1 | 1.7 |
| 0.01 | 0.60 | 35 ± 2 | 2.9 ± 0.4 | 63 ± 1 | 6.7 ± 0.1 | 1009 ± 8 | 1.93 | 58 ± 6 | 2.8 ± 0.4 | 15 ± 2 | 1.6 |
| 0.03 | 0.40 | 45 ± 1 | 2.9 ± 0.1 | 59 ± 4 | 6.4 ± 0.1 | 1033 ± 5 | 1.85 | 59 ± 4 | 2.6 ± 0.2 | 16 ± 3 | 1.4 |
| 0.94 | 0.15 | 45 ± 1 | 3.5 ± 0.1 | 61 ± 1 | 6.6 ± 0.1 | 1778 ± 8 | 0.53 | 68 ± 6 | 2.3 ± 0.3 | 27 ± 3 | 1.7 |
| 0.03 | 1.50 | 46 ± 1 | 3.3 ± 0.1 | 51 ± 1 | 6.5 ± 0.1 | 1056 ± 4 | 1.78 | 61 ± 2 | 2.5 ± 0.1 | 21 ± 2 | 2.0 |
| 0.97 | 0.15 | 47 ± 1 | 3.4 ± 0.1 | 56 ± 1 | 6.4 ± 0.1 | 1728 ± 12 | 0.59 | 74 ± 8 | 1.7 ± 0.5 | 30 ± 4 | 2.5 |
| 0.10 | 1.50 | 53 ± 1 | 3.7 ± 0.1 | 46 ± 1 | 6.3 ± 0.1 | 1079 ± 4 | 1.72 | 56 ± 2 | 2.9 ± 0.2 | 20 ± 2 | 2.0 |
| 1.04 | 0.15 | 55 ± 1 | 3.8 ± 0.1 | 48 ± 1 | 6.3 ± 0.1 | 1753 ± 5 | 0.56 | 74 ± 2 | 2.3 ± 0.3 | 34 ± 3 | 2.7 |
| 0.15 | 1.50 | 64 ± 1 | 3.8 ± 0.1 | 35 ± 1 | 6.7 ± 0.1 | 1095 ± 5 | 1.67 | 56 ± 2 | 2.8 ± 0.2 | 23 ± 3 | 1.9 |