Table 2.

Experimental parameters for SEM-EDX imaging of the different samples.

	CuS particles	Cell samples	Ceramics	Aerosol Sample
Magnification	2600×	4000×	1500×	1200×
SEM acceleration voltage (kV)	10	5	25	10
EDX imaged area (µm)	129 × 99	87 × 67	225 × 173	282 × 216
EDX spatial resolution (nm)	126	85	220	275
Exported elements from EDX	Al, Cu, O, S	Au, Br, C, Ca, Cl, K, Mg, N, Na, O, P, Pd, S	Al, C, Fe, Hf, O, Si, Y, Zr	Al, Ba, C, Ca, Cl, Cr, Cu, Fe, K, Mg, Mn, N, Na, O, P, S, Si, Zn