Table 1.

Comparison among the two operating modes of the presented module and other photon detection solutions.

Detector	Dimension (μm)		Array size	Single-pixel PDE (%)			DCR (cps)	Max count rate (Mcps)	Dynamic range (dB)a
	Diameter	Pitch		400 nm	550 nm	800 nm
MPD16	50		1	24	49	15	95b	12	121.8
Excelitas17	180		1	9	55	62	25b	40	138.1
0.35-μm CMOS18	20		1	50	34	5	25	50	140
0.13-μm CMOS19	8		1				410	185	139.2
Best SPAD	50		1	22	49	13	72b	33	131.8
Event-driven13	8	45	64×48	12	20	4	1136640	80	97.5
SiPM7	14c	25	40×40	75	55	16	270000	1000	125.7
Combined mode	50	250	8×8	22	49	13	33470b	2130	141.3

^aDynamic range is expressed as 20 log DR.

^bThermoelectrically cooled.

^cSquare side length.