| Duty Cycle | 15% |
| Peak Incident Power | 450 |
| Cycles per Burst | 200 |
| Set Mode | Frequency sweeping |
| Continuous degassing | |
| Process time | 80 s |
| Number of cycles | 5 |
| Duty Cycle | 15% |
| Peak Incident Power | 450 |
| Cycles per Burst | 200 |
| Set Mode | Frequency sweeping |
| Continuous degassing | |
| Process time | 80 s |
| Number of cycles | 5 |