Table 2.

Young’s moduli of gold thin-films from literature.

Reference	Fabrication Method	Characterization Method	Film Thickness (nm)	Young’s Modulus (GPa)
[15]	E-beam evaporation	Nanoindentation testing	100	55.5
			300	64.1
			500	88.76
[16]	Metal plasma immersion ion implantation and deposition	Microcantilever beam testing	19–62	69.1
[17]	E-beam evaporation	Microbeam testing	1000	57
		Nanoindentation testing		74
[18]	Multi-user microelectromechanical systems processes	Microcantilever beam testing	500	78
[19]	Sputtering	Microtensile testing	180	61.0
			310	49.5
			500	53.9
			680	53.1
			950	51.2
			1000	57.5
[20]	E-beam evaporation	Membrane deflection experiment	300	53–55
			500
			1000