a-Ge	preamorphized (Section 2) or amorphous germanium (Section 5)
a-Si	preamorphized (Section 3) or amorphous silicon (Section 5)
FIB	focused ion beam
GPGPU	general purpose computation on graphics processing unit
IBIESD	ion-beam induced enhanced self-diffusion
MBE	molecular beam epitaxy
MD	molecular dynamics
PDT	pixel dwell time
PKA	primary knock-on atom
RBS/C	Rutherford backscattering spectrometry in channeling geometry
RDF	radial distribution function
SIMS	secondary ion mass spectrometry
SPE	solid phase epitaxy
SW	Stillinger-Weber
XTEM	cross-sectional transmission electron microscope