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. 2017 Aug 17;7:8524. doi: 10.1038/s41598-017-08886-y

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© The Author(s) 2017

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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(a–c) SEM images of the 3D hollow nanoelectrodes embedded in the epoxy polymer SU8. Respectively, 3 × 3 array of nanoelectrodes, single nanoelectrode and cross section of a single hollow nanoelectrode. The different layers are indicated by the yellow arrows. (d) Top view of the PDMS microfluidic chamber. The wire is coming out from the PDMS being bonded by silver paste with the gold spattered onto the device making all the nanoelectrodes connected together. The glass ring around the device allows the cell culture on to the nanofluidic electrodes.