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. Author manuscript; available in PMC: 2018 Jul 1.
Published in final edited form as: IEEE Trans Ultrason Ferroelectr Freq Control. 2017 May 8;64(7):1078–1086. doi: 10.1109/TUFFC.2017.2702010

Fig. 1.

Fig. 1

(A) Oblique and cross-sectional views of the acoustic stack, with dotted line indicating cross-sectional cut through Tx element (B) and dashed line indicating cross-section cut through Rx element (C). HF ML = high frequency matching layer, LF ML = low frequency matching layer, FSIL = frequency-selective isolation layer, Au = sputtered Ti/Au conductive layer. Further details on materials are provided in Table I.