Fig. 1.

Hybrid quantum photonic circuit. a Schematic view of the fabricated hybrid quantum photonic circuit, consisting of an InAsP QD in an InP nanowire (ruby coloured) that is integrated with a SiN waveguide (blue) and on-chip tunable ring resonator filter. The ring resonator filter is tuned by applying voltage to the gold contacts (orange). The out-of-plane laser (green) excites the QD, which emits single photons (ellipsoids) into the waveguide. b–d The CMOS compatible process flow for integrating the nanowire-based quantum light sources within the hybrid quantum photonic circuit. Using a custom-built tungsten nanomanipulation tool, the nanowires are transferred from the growth chip to the selected photonic circuit substrate. e A microscope image of an integrated single-photon source with a SiN photonic waveguide, the scale bar has length of 5 µm. Emitted photons are coupled to the SiN photonic channel with the possibility to collect both forward and backward photons independently. The photonic circuits are fabricated with respect to the transferred quantum emitters as described in the Methods section. f, g The collected forward and backward photoluminescence (PL) from the nanowire QD, respectively. T and X represent the trion and exciton emission lines, respectively