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. 2017 Jul 31;10(8):880. doi: 10.3390/ma10080880

Table 1.

Electrical characteristics of the In-doped ZnO TFTs with different In contents.

In Concentration (%) Thickness (nm) μ (cm2/Vs) VTh (V) Ion/Ioff
0 13.5 - - -
1 42 0.004 11.2 3.5 × 103
3 56 0.07 9.9 5.4 × 105
5 64 0.14 8.4 9.5 × 105
7 29.7 0.16 4.9 5 × 102
9 31.1 - - 10