Table 1.
In Concentration (%) | Thickness (nm) | μ (cm2/Vs) | VTh (V) | Ion/Ioff |
---|---|---|---|---|
0 | 13.5 | - | - | - |
1 | 42 | 0.004 | 11.2 | 3.5 × 103 |
3 | 56 | 0.07 | 9.9 | 5.4 × 105 |
5 | 64 | 0.14 | 8.4 | 9.5 × 105 |
7 | 29.7 | 0.16 | 4.9 | 5 × 102 |
9 | 31.1 | - | - | 10 |
In Concentration (%) | Thickness (nm) | μ (cm2/Vs) | VTh (V) | Ion/Ioff |
---|---|---|---|---|
0 | 13.5 | - | - | - |
1 | 42 | 0.004 | 11.2 | 3.5 × 103 |
3 | 56 | 0.07 | 9.9 | 5.4 × 105 |
5 | 64 | 0.14 | 8.4 | 9.5 × 105 |
7 | 29.7 | 0.16 | 4.9 | 5 × 102 |
9 | 31.1 | - | - | 10 |