Skip to main content
. Author manuscript; available in PMC: 2017 Sep 1.
Published in final edited form as: Int Solid State Sens Actuators Microsyst Conf. 2017 Jun;2017:135–138. doi: 10.1109/TRANSDUCERS.2017.7994006

Figure 2.

Figure 2

Bio-compatible chip packaging and PCB (bottom), chip micrograph (close-up top-left), and SEM image (close-up top-right) of the post-processed array surface with rat cortical neurons. The HD-MEA chip was fabricated in 0.18-µm CMOS technology.