Table 2.

Minimum and maximum values of Pattern Widths and Inter-Pattern Distances found in the examined samples A-M (i.e., upon changing the starting Ternary Solution composition) for primary, secondary and tertiary patterns.

	Pattern Width (PW, μm)		Min-Max Inter-Pattern Distance (IPD, μm)
	Min	Max	Min	Max
Primary Patterns	0.36 ± 0.08	2.9 ± 0.7	28 ± 8	570 ± 80
Secondary Patterns	0.21 ± 0.08	1.4 ± 0.6	3.2 ± 0.7	59 ± 15
Tertiary Patterns*	0.08 ± 0.01	0.6 ± 0.1	0.5 ± 0.1	7.6 ± 0.5

*For tertiary patterns some tiny features were not measured, as they were often ill-defined and/or damaged under the electron beam of the SEM.