Figure 3.
Measurement of spot size by scanning ion beam across edge of cleaved Si wafer. (a) Secondary electron image of wafer edge; (b) single line scan (blue) and fit to error function (green).
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.