U11	U22	U33	U12	U13	U23
C12	0.0274 (8)	0.0421 (9)	0.0502 (10)	0.0188 (7)	0.0187 (7)	0.0374 (8)
C11	0.0297 (7)	0.0153 (6)	0.0263 (7)	0.0065 (5)	0.0131 (6)	0.0090 (5)
S1	0.01646 (16)	0.01708 (15)	0.02248 (17)	0.00497 (12)	0.00379 (13)	0.01202 (12)
O	0.0182 (5)	0.0184 (4)	0.0173 (4)	0.0022 (4)	0.0071 (4)	0.0030 (4)
N2	0.0138 (5)	0.0164 (5)	0.0197 (5)	0.0056 (4)	0.0053 (4)	0.0104 (4)
N1	0.0152 (5)	0.0145 (5)	0.0182 (5)	0.0059 (4)	0.0059 (4)	0.0083 (4)
N3	0.0174 (5)	0.0228 (5)	0.0238 (6)	0.0108 (4)	0.0097 (5)	0.0157 (5)
C6	0.0154 (6)	0.0201 (6)	0.0178 (6)	0.0059 (5)	0.0085 (5)	0.0101 (5)
C3	0.0151 (6)	0.0164 (6)	0.0187 (6)	0.0042 (5)	0.0081 (5)	0.0076 (5)
C1	0.0163 (6)	0.0135 (5)	0.0139 (5)	0.0060 (5)	0.0075 (5)	0.0046 (4)
C4	0.0131 (5)	0.0158 (5)	0.0161 (6)	0.0072 (5)	0.0055 (5)	0.0082 (5)
C7	0.0134 (5)	0.0169 (6)	0.0144 (6)	0.0067 (5)	0.0036 (5)	0.0065 (4)
C9	0.0154 (6)	0.0182 (6)	0.0202 (6)	0.0065 (5)	0.0094 (5)	0.0110 (5)
C8	0.0131 (5)	0.0146 (5)	0.0194 (6)	0.0041 (4)	0.0056 (5)	0.0086 (5)
C5	0.0131 (5)	0.0154 (5)	0.0186 (6)	0.0042 (4)	0.0060 (5)	0.0087 (5)
C10	0.0213 (6)	0.0225 (6)	0.0263 (7)	0.0131 (5)	0.0155 (5)	0.0152 (5)