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Summary of the TFT device parameters with the reference IGZO and Ta/IGZO annealed at various temperatures.
| Samples | μFE (cm2/Vs) | SS (V/decade) | VTH (V) | ION/OFF |
|---|---|---|---|---|
| (a) Control Device | 18.1 ± 0.6 | 0.8 ± 0.1 | 0.9 ± 0.2 | 1.2 × 107 |
| (b) Ta/ IGZO 200 °C | 42.7 ± 2.7 | 0.4 ± 0.1 | 0.5 ± 0.2 | 3.4 × 107 |
| (c) Ta/ IGZO 300 °C | 54.0 ± 4.7 | 0.3 ± 0.1 | 0.2 ± 0.2 | 4.4 × 107 |
| (d) Ta/ IGZO 400 °C | 27.3 ± 1.1 | 0.5 ± 0.1 | 0.7 ± 0.3 | 2.2 × 107 |
Average and standard deviation values are included.
