Skip to main content
. Author manuscript; available in PMC: 2017 Sep 9.
Published in final edited form as: Appl Opt. 2016 Jul 1;55(19):5208–5218. doi: 10.1364/AO.55.005208

Fig. 13.

Fig. 13

Spherical aberration Zernike coefficients before training with equipotential voltages across all four electrodes and after training with optimized voltages applied to the MEMS mirror over a 40 μm focus range, Δz, behind the objective lens. The algorithm was able to correct z40 over most of the focal range of the MEMS mirror.