Table 1.
Effective filling factors of the fabricated nanostructures for the three densities and ordering
| Density | 5/μm2 (%) | 10/μm2 (%) | 10/μm2 (%) |
|---|---|---|---|
| Ordered | f = 14.7 | f = 29.1 | f = 41.3 |
| Random | f = 14.2 | f = 28.4 | f = 42.5 |
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