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. Author manuscript; available in PMC: 2018 Aug 1.
Published in final edited form as: IEEE Trans Ultrason Ferroelectr Freq Control. 2017 May 29;64(8):1261–1268. doi: 10.1109/TUFFC.2017.2709623

Fig. 3.

Fig. 3

The illustration of the fabrication process for the acoustic stack.