Table 3.

Comparison of the cantilever PEH devices in our work and reported literature.

Piezoelectric layers	ACC	fres (Hz)	Pmax (μW)	(P/V)max (mW/cm3)	Ref.
PVDF	0.5g	34.4	112.8	8.61	This work
PZT	0.25g	109.5	335.2	0.296	[11]
PZT	0.6g	42	0.114	1.48	[13]
PVDF	1.2g	17	16	0.176	[22]
PVDF	1g	103.8	10.6	1.94	[23]
PZT	1g	29.6	15300	13.5	[29]
PMN-PT	0.23g	174	586	0.753	[30]