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. 2017 Sep 20;8:628. doi: 10.1038/s41467-017-00733-y

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© The Author(s) 2017

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 3 — EQE measurement. a EQE measurements of 500 μm diameter control (blue solid) and light-trapping SPADs (red solid); dashed black lines correspond to theoretical absorption of 3, 12, and 25 μm thick Si from left to right. b EQE enhancement: ratio of light-trapping SPAD EQE compared to control SPAD EQE at different wavelengths