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Oxide thickness profile derived from XPS data. The oxide thickness has an uncertainty of 1 nm due to the finite step size of the Ar etching.
| Anneal time (min) | Environment | Oxide thickness (nm) |
|---|---|---|
| 0 (as-cast) | N/A | 3.9 |
| 30 | Atm. | 6.7 |
| 60 | Atm. | 7.6 |
| 30 | Vac. | 4.6 |
| 60 | Vac. | 5.5 |
| 60 | N2 | 3.3 |
