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Examples of recently reported thermoelectronic sensors, (a) Cross-sectional view of membrane diodes, reference diode and CMOS cells; (b) Cross-sectional view of the micro-heater, suspended diodes and reference diode; (c) Cross-sectional view of 4H-SiCpn diode based temperature sensor; (d) Measured forward voltage versus temperature at different forward current densities of the 4H-SiC pn diode (reprinted with permission from Appl. Phys. Lett.).
