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Performance of the micro accelerometer using the optimized area-changed transducer. (a) Static output of the area-changed capacitive micro accelerometer for eight days. A Ms5.9 earthquake that occurred in Taiwan at 23:51 06/10/2016 (UTC-8) was detected. The details of the earthquake detected by our micro accelerometer and the commercial seismometer show good agreement. (b) Noise-limited resolution of the optimized accelerometer.
