Table 2.
Summary of the key parameters of the accelerometer.
| Component | Value | Unit |
|---|---|---|
| Thickness of SiO2 | 0.2 | μm |
| Thickness of electrodes | 0.4 | μm |
| Thickness of the PSPI | 3 | μm |
| Solder bonding thickness pre-optimization | 90 | μm |
| Solder bonding thickness post-optimization | 20 | μm |
| Dimension of a single electrode | 0.1 × 0.3 | mm |
| Width of spring | 42 | μm |
| Length of spring | 9 | mm |
| Number of springs on both side of proof mass | 12 | pair |
| Number of arrayed capacitors (n) | 45 | - |
| Length of the electrode (l) | 3 | mm |
| Width of a single electrode (a) | 0.1 | mm |
| Capacitors spacing pre-optimization (d) | 90 | μm |
| Capacitor spacing post-optimization (d’) | 30 | μm |
| Thickness of the silicon substrate | 500 | μm |
| Mass of the proof mass (m) | 0.4 | g |
| Frequency of the spring-mass structure (f) | 15 | Hz |