Fig. 1.

Optomechanical set-up with two resonators in an optical cavity. a A schematic diagram of the optical cavity with two mechanical trampoline resonators. The resonators are constructed from low pressure chemical vapor deposition (LPCVD) silicon nitride. One resonator has a distributed Bragg reflector (DBR) mirror b and one resonator is a bare membrane c. b and c are optical microscope images of the two resonators, with 1 mm scale bar. The resonators are suspended from a shared outer resonator to provide mechanical isolation from the environment. This figure is not to scale