Table 2.
Number of Spots | Spot Time (ms) | Spot Overlap (mm) | Focus Offset (mA) | Beam Current (mA) | Vertical Surface Roughness (µm) | Horizontal Surface Roughness (µm) | |
---|---|---|---|---|---|---|---|
M1 | 10 | 0.6 | 0.2 | 1 | 4 | 40.5 ± 2.7 | 32.3 ± 2.3 |
M2 | 10 | 0.6 | 0.2 | 1 | 6 | 37.7 ± 2.9 | 29.2 ± 2.8 |
M3 | 10 | 0.6 | 0.2 | 3 | 4 | 38.2 ± 2.1 | 31.4 ± 2.9 |
M4 | 10 | 0.6 | 0.2 | 3 | 6 | 37.3 ± 3.5 | 28.4 ± 3.9 |
M5 | 10 | 0.8 | 0.4 | 3 | 4 | 32.6 ± 1.7 | 30.0 ± 1.4 |
M6 | 40 | 0.6 | 0.2 | 1 | 4 | 31.8 ± 1.9 | 31.5 ± 2.1 |
M7 | 40 | 0.6 | 0.2 | 1 | 6 | 31.8 ± 2.6 | 30.5 ± 2.9 |
M8 | 40 | 0.6 | 0.2 | 3 | 4 | 29.6 ± 2.3 | 28.9 ± 2.2 |
M9 | 40 | 0.6 | 0.2 | 3 | 6 | 33.6 ± 1.6 | 31.4 ± 1.3 |
M10 | 40 | 0.6 | 0.4 | 1 | 6 | 29.8 ± 1.5 | 29.7 ± 3.7 |
M11 | 40 | 0.8 | 0.2 | 1 | 6 | 33.0 ± 1.2 | 30.3 ± 1.4 |
M12 | 40 | 0.8 | 0.2 | 3 | 6 | 30.7 ± 1.4 | 29.1 ± 2.4 |
M13 | 40 | 0.8 | 0.4 | 1 | 4 | 31.6 ± 1.4 | 30.5 ± 2.0 |
M14 | 40 | 0.8 | 0.4 | 1 | 6 | 34.7 ± 3.1 | 33.0 ± 1.7 |
M15 | 40 | 0.8 | 0.4 | 3 | 4 | 30.9 ± 1.2 | 30.6 ± 2.0 |
M16 * | 40 | 0.8 | 0.2 | 3 | 4 | 31.7 ± 1.9 | 31.0 ± 1.9 |
M17 | 55 | 0.4 | 0.4 | 3 | 4 | 27.3 ± 1.7 | 25.5 ± 3.2 |
M18 | 55 | 0.4 | 0.6 | 3 | 4 | 26.1 ± 0.9 | 27.0 ± 2.9 |
M19 | 55 | 0.8 | 0.4 | 3 | 4 | 32.4 ± 1.3 | 31.5 ± 2.1 |
M20 | 55 | 0.8 | 0.6 | 3 | 4 | 32.9 ± 1.3 | 30.6 ± 2.4 |
M21 | 70 | 0.4 | 0.4 | 3 | 4 | 28.9 ± 2.0 | 27.8 ± 1.9 |
M22 | 70 | 0.4 | 0.6 | 3 | 4 | 28.4 ± 1.2 | 25.8 ± 1.9 |
M23 | 70 | 0.8 | 0.4 | 3 | 4 | 35.1 ± 3.8 | 33.3 ± 2.3 |
M24 | 70 | 0.8 | 0.6 | 3 | 4 | 33.6 ± 1.9 | 32.3 ± 1.6 |
M25 | 80 | 0.4 | 0.4 | 3 | 4 | 27.9 ± 1.4 | 27.1 ± 1.9 |
M26 | 80 | 0.4 | 0.6 | 3 | 4 | 29.3 ± 1.7 | 28.0 ± 2.5 |
M27 | 80 | 0.8 | 0.4 | 3 | 4 | 34.2 ± 1.7 | 32.6 ± 2.0 |
M28 | 80 | 0.8 | 0.6 | 3 | 4 | 34.7 ± 1.5 | 33.5 ± 1.9 |
* The default processing parameters obtained from Arcam AB.