Table 3.
Measurements of Spatial Resolution Using Line Gratings across Various Instrument Settingsa
laser focus setting | laser power (%) | smallest resolved separation (μm) |
---|---|---|
single | 19.0 | <30 |
21.0 | <30 | |
23.0 | <30 | |
Mod 5 | 39.4 | 50 |
43.4 | 60 | |
47.4 | 60 | |
Mod 5 defocused | 62.8 | <30 |
66.0 | 35 | |
70.0 | 70 |
Data were collected using a Bruker Rapiflex.