Table 1.

Comparison of designed and measured values of parameters of the microelectromechanical system (MEMS) pitch tunable diffraction grating.

Device Parameters	Symbol	Designed $\left(\mathsf{\mu }m\right)$	Measured $\left(\mathsf{\mu }m\right)$
grating beam length	$L_g$	1000	1000
grating beam width	$w_g$	6	5.9
grating pitch	$\mathsf{\Lambda }$	12	12
device thickness	t	10	10
holding spring width	$w_h$	2	1.9
holding spring length	$L_h$	122	122
actuating spring width	$w_a$	2	2.7
actuating spring length	$L_a$	333	333
comb finger length	$L_c$	50	50
comb finger width	$w_c$	2	0.7
initial overlap distance	$x_0$	2	1.8
Device Parameters	Symbol	Designed
No. of grating beams	N	84
No. of comb fingers	n	125