Table 1. Properties of PZT Films on Glass, Si, and STO Substrates with CNO and TiO Nanosheets.

^aAverage root-mean-square roughness (R_rms), determined from AFM images in an average over area of 10 × 10 μm².

^bDeposition rate (R_av).

^cAverage grain size (d_col), determined from SEM cross-section.

^dAverage volume void fraction and average grain spacing calculated as in ref (34) from the measured R_av data, assuming that the (10 Hz, 600 °C)-film is 100% dense.

^eOn top of nanosheet.

^fFilm is assumed to be 100% dense.

^gEstimated from the average deposition rate and the average grain diameter, following the procedure described in ref (34).