Table 1. Data summary of tungsten/silicon oxide comb structures: physical dimensions, inspected areas, number of cells inspected, % population of cells with 10° > ϕ > −10° and 20° > ϕ > −20° of the metal line axis. The culture media initial cell concentration used was 2 × 105 cells/mL. Data spreads correspond to one standard deviation.
Structure | W line width | silicon oxide line width | inspected comb structure area | number of cells in structure | cell density (cells/mm2) | % population aligned ±10o from W lines | % population aligned ±20o from W lines |
---|---|---|---|---|---|---|---|
(μm) | (μm) | (mm2) | (n) | (cells/mm2) | (10o > ϕ > −10o) | (20o > ϕ > −20o) | |
1 | 0.18 | 0.18 | 1.8 | 308 | 171 | 16 ± 2 | 30 ± 2 |
2 | 0.25 | 0.25 | 1.8 | 300 | 167 | 22 ± 2 | 36 ± 5 |
3 | 0.5 | 0.5 | 1.8 | 500 | 278 | 23 ± 2 | 47 ± 1 |
4 | 1 | 1 | 1.8 | 403 | 224 | 31 ± 1 | 53 ± 6 |
5 | 2 | 2 | 3.6 | 525 | 146 | 27 ± 5 | 52 ± 3 |
6 | 5 | 5 | 1.8 | 402 | 223 | 50 ± 7 | 73 ± 6 |
7 | 10 | 10 | 3.6 | 804 | 223 | 56 ± 3 | 73 ± 1 |
8 | 50 | 50 | 2.0 | 378 | 189 | 41 ± 3 | 66 ± 3 |
9 | 100 | 100 | 9.0 | 1434 | 159 | 32 ± 1 | 50 ± 3 |
10 | 10 | 90 | 8.4 | 1184 | 141 | 87 ± 1 | 91 ± 1 |