| U11 | U22 | U33 | U12 | U13 | U23 | |
| F | 0.111 (2) | 0.0973 (18) | 0.0577 (14) | −0.0417 (15) | 0.0308 (13) | −0.0126 (13) |
| N1 | 0.0534 (18) | 0.0491 (17) | 0.0401 (15) | −0.0023 (14) | −0.0122 (13) | −0.0089 (13) |
| O1 | 0.0653 (16) | 0.0822 (19) | 0.0573 (15) | 0.0048 (14) | −0.0190 (13) | −0.0360 (14) |
| C1 | 0.0391 (17) | 0.0353 (16) | 0.0296 (15) | 0.0022 (14) | −0.0054 (13) | −0.0046 (13) |
| N2 | 0.0459 (16) | 0.0382 (15) | 0.0412 (15) | 0.0039 (13) | −0.0051 (13) | 0.0028 (12) |
| O2 | 0.0672 (17) | 0.0560 (15) | 0.0732 (17) | 0.0115 (13) | −0.0284 (14) | −0.0253 (13) |
| C2 | 0.0433 (18) | 0.0373 (17) | 0.0297 (16) | −0.0008 (14) | −0.0064 (14) | −0.0011 (13) |
| O3 | 0.0520 (15) | 0.0496 (14) | 0.0694 (16) | 0.0128 (12) | −0.0009 (13) | 0.0132 (12) |
| C3 | 0.0471 (19) | 0.0410 (18) | 0.0325 (16) | 0.0018 (15) | −0.0026 (14) | −0.0030 (14) |
| O4 | 0.0452 (14) | 0.0510 (14) | 0.0462 (13) | 0.0065 (11) | 0.0017 (11) | 0.0003 (11) |
| C4 | 0.063 (2) | 0.047 (2) | 0.0464 (19) | 0.0075 (18) | −0.0100 (17) | −0.0090 (16) |
| C5 | 0.075 (3) | 0.044 (2) | 0.060 (2) | 0.0071 (19) | −0.009 (2) | −0.0092 (17) |
| C6 | 0.062 (3) | 0.049 (2) | 0.060 (2) | 0.0139 (18) | −0.001 (2) | −0.0031 (19) |
| C7 | 0.049 (2) | 0.057 (2) | 0.048 (2) | 0.0079 (18) | −0.0100 (17) | 0.0050 (18) |
| C8 | 0.047 (2) | 0.047 (2) | 0.0386 (18) | 0.0018 (16) | −0.0059 (15) | 0.0017 (15) |
| C9 | 0.0410 (18) | 0.0382 (17) | 0.0355 (17) | 0.0015 (14) | −0.0061 (14) | −0.0039 (14) |
| C10 | 0.047 (2) | 0.055 (2) | 0.0384 (18) | −0.0085 (17) | −0.0013 (16) | −0.0107 (16) |
| C11 | 0.098 (4) | 0.056 (3) | 0.116 (4) | 0.008 (2) | −0.022 (3) | −0.044 (3) |
| C12 | 0.137 (6) | 0.164 (7) | 0.272 (10) | 0.044 (5) | −0.060 (6) | −0.135 (7) |
| C13 | 0.0357 (17) | 0.0361 (17) | 0.0333 (16) | −0.0020 (13) | −0.0032 (13) | −0.0072 (13) |
| C14 | 0.0410 (19) | 0.0422 (18) | 0.0381 (17) | −0.0016 (15) | −0.0077 (15) | −0.0082 (14) |
| C15 | 0.0401 (19) | 0.047 (2) | 0.051 (2) | 0.0038 (16) | −0.0063 (16) | −0.0036 (16) |
| C16 | 0.043 (2) | 0.068 (3) | 0.070 (3) | 0.0091 (19) | 0.0035 (19) | −0.014 (2) |
| C17 | 0.050 (2) | 0.075 (3) | 0.057 (2) | −0.009 (2) | 0.0058 (18) | −0.010 (2) |
| C18 | 0.048 (2) | 0.053 (2) | 0.053 (2) | −0.0056 (18) | −0.0059 (17) | −0.0028 (17) |
| C19 | 0.0422 (19) | 0.0435 (19) | 0.0398 (18) | −0.0041 (15) | −0.0044 (15) | −0.0071 (15) |
| C20 | 0.0380 (18) | 0.0335 (17) | 0.0381 (17) | −0.0039 (14) | −0.0022 (14) | −0.0024 (14) |
| C21 | 0.046 (2) | 0.0375 (18) | 0.0383 (18) | 0.0026 (15) | −0.0074 (15) | −0.0039 (15) |
| C22 | 0.044 (2) | 0.060 (2) | 0.063 (2) | 0.0032 (18) | 0.0058 (18) | −0.0133 (19) |
| C23 | 0.065 (3) | 0.091 (3) | 0.084 (3) | −0.011 (2) | 0.020 (2) | −0.013 (3) |
| C24 | 0.0384 (18) | 0.0332 (16) | 0.0377 (17) | 0.0026 (14) | −0.0060 (14) | 0.0000 (13) |
| C25 | 0.048 (2) | 0.046 (2) | 0.0441 (19) | −0.0018 (16) | −0.0078 (16) | −0.0071 (15) |
| C26 | 0.077 (3) | 0.055 (2) | 0.069 (3) | 0.000 (2) | −0.025 (2) | −0.022 (2) |
| C27 | 0.066 (3) | 0.062 (3) | 0.082 (3) | −0.014 (2) | −0.016 (2) | −0.014 (2) |
| C28 | 0.066 (3) | 0.064 (3) | 0.097 (3) | −0.023 (2) | 0.001 (3) | 0.000 (2) |
| C29 | 0.062 (2) | 0.057 (2) | 0.049 (2) | −0.0120 (19) | −0.0008 (18) | −0.0093 (18) |
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